Quantitative electron-beam tester for defects in semiconductors (CL/EBIC/SDLTS system)
- 1 August 1995
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 66 (8) , 4277-4282
- https://doi.org/10.1063/1.1145382
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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- Scanning deep level transient spectroscopy (SDLTS)Scanning, 1985
- Cathodoluminescence and polarization studies from individual dislocations in diamondPhilosophical Magazine Part B, 1984
- Charge collection scanning electron microscopyJournal of Applied Physics, 1982
- A new spectroscopic technique for imaging the spatial distribution of nonradiative defects in a scanning transmission electron microscopeApplied Physics Letters, 1977