Holographic projection of microcircuit patterns
- 9 February 1968
- journal article
- Published by Institution of Engineering and Technology (IET) in Electronics Letters
- Vol. 4 (3) , 49-50
- https://doi.org/10.1049/el:19680040
Abstract
The resolution of the real image formed by a hologram has been investigated experimentally with a view to overcoming the disadvantages of the present contact-print method of manufacturing microcircuits. A resolution of 4μm over an area of 2.5 cm diameter has been obtained so far.Keywords
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