Microstructure, bombardment effects and SEM characterization of reactively rf-sputtered Fe-N films
- 31 March 1984
- journal article
- Published by Elsevier in Materials Research Bulletin
- Vol. 19 (3) , 261-268
- https://doi.org/10.1016/0025-5408(84)90166-1
Abstract
No abstract availableKeywords
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