Recovery, reuse, and recycle of water in semiconductor wafer fabrication facilities

• 1 December 1997
• journal article
• water
• Published by Wiley in Environmental Progress
• Vol. 16  (4) , 263-267
• https://doi.org/10.1002/ep.3300160414

Abstract

Keywords

• RECYCLE
• MODEL
• SEMICONDUCTOR
• ITEMS
• REUSE
• WAFER
• FABRICATION
• REMOVAL
• PURIFICATION
• SPENT