Non-silicon applications of direct bonding
- 31 December 1995
- journal article
- Published by Elsevier in Philips Journal of Research
- Vol. 49 (1-2) , 151-163
- https://doi.org/10.1016/0165-5817(95)82008-6
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Simple Analytical Model for Continuous-Wave-Laser Melting Allowing for Reflectivity Change at the Solid/Liquid BoundaryJapanese Journal of Applied Physics, 1989
- Defect structures in laser-fused Si-SiO2 wafersApplied Physics Letters, 1989