An electron-beam microcolumn with improved resolution, beam current, and stability

• 1 November 1995
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 13  (6) , 2498-2503
• https://doi.org/10.1116/1.588381

Abstract

Keywords

• FULL WIDTH HALF MAXIMUM
• FIELD EMISSION
• CURRENT DENSITY
• ELECTRON BEAM