All Dry Lithography Processes and Mechanistic Studies with Poly(methacrylonitrile) and Related Polymers
- 1 May 1981
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 128 (5) , 1065-1071
- https://doi.org/10.1149/1.2127551
Abstract
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