Space-charge-limited currents in electron-irradiated dielectrics

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Abstract
This paper develops the theory of steady-state currents generated in a dielectric placed between positively or negatively biased electrodes and irradiated with a partially penetrating electron beam. The dielectric is divided into an irradiated region (IR), which extends from the electrode of incidence to the extrapolated range of the beam, and a nonirradiated region (NIR). In the IR the primary beam generates an electron-hole plasma. Its end plane acts as a virtual electrode embedded in the dielectric. Currents are space-charge limited in the NIR and Ohmic in the IR which is characterized by a uniform radiation-induced conductivity. Depending on the polarity of the electrode bias, electrons or holes are drawn from the IR into the NIR. The theory correctly predicts an apparent threshold effect for the inset of steady-state currents: the current amplitudes remain small as long as the electron range is smaller than half the sample thickness, and increase strongly only afterwards. Calculated current curves for different beam energies are in satisfactory agreement with experimental results. The role of the electron beam as a virtual electrode is discussed.

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