Mechanism of Cluster Formation in a Clean Silane Discharge
- 1 July 1993
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 140 (7) , 1935-1942
- https://doi.org/10.1149/1.2220742
Abstract
The mechanism of the formation of hydrogenated silicon clusters in a clean silane glow discharge is studied with elastic light scattering. The data are complemented by mass spectrometric measurements and theoretical modeling. In a clean discharge with a maximum oxygen and water content of <0.1 mole percent (m/o) the appearance of the clusters correlates with the formation of higher polysilanes. A possible mechanism of the cluster formation is suggested.Keywords
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