A 400 kV High Resolution-Analytical Electron Microscope Newly Constructed

Abstract
A resolution limit of 0.23 nm has been achieved successfully by a newly constructed 400 kV analytical electron microscope equipped with an energy dispersive X-ray spectrometer. The characteristic of the new microscope is briefly described and structure images of H-Nb2O5 - and 6H-SiC crystals are obtained to show the observation capability of high resolution structure imaging.

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