Stability of tantalum nitride thin film resistors
- 1 June 1990
- journal article
- Published by Springer Nature in Journal of Materials Research
- Vol. 5 (6) , 1224-1232
- https://doi.org/10.1557/jmr.1990.1224
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Handbook of Thin Film TechnologyJournal of the Electrochemical Society, 1971
- Electrical Conduction Mechanism in Ultrathin, Evaporated Metal FilmsJournal of Applied Physics, 1962