Simple rotating shutter for low coverage depositions of accurate thickness
- 1 February 1982
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science and Technology
- Vol. 20 (2) , 243-244
- https://doi.org/10.1116/1.571366
Abstract
A method is developed using a rotating shutter with a stepped sector disk to produce ultrathin evaporated layers of accurately known thickness. Deposition of insulating barriers for tunnel junctions was accomplished with this shutter.Keywords
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