Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence
- 1 February 1998
- journal article
- Published by Trans Tech Publications, Ltd. in Materials Science Forum
- Vol. 264-268, 179-182
- https://doi.org/10.4028/www.scientific.net/msf.264-268.179
Abstract
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