Two‐Dimensional Modeling of Low Pressure Chemical Vapor Deposition Hot Wall Tubular Reactors: I . Hypotheses, Methods, and First Results
- 1 January 1992
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 139 (1) , 296-304
- https://doi.org/10.1149/1.2069189
Abstract
No abstract availableThis publication has 0 references indexed in Scilit: