Cutting of thin metal films with a CO2-gas laser beam
- 1 November 1968
- journal article
- Published by Elsevier in Microelectronics Reliability
- Vol. 7 (4) , 305-311
- https://doi.org/10.1016/0026-2714(68)90117-0
Abstract
No abstract availableThis publication has 2 references indexed in Scilit:
- HIGH-OUTPUT POWERS AND LONG LIFETIMES OF SEALED-OFF CO2 LASERSApplied Physics Letters, 1967
- Experiments on the low-voltage machining of thin filmsMicroelectronics Reliability, 1965