The Depth Profiling of Glass Surfaces by Mass Spectrometry Using Neutral-particle Bombardment
- 1 July 1981
- journal article
- research article
- Published by Oxford University Press (OUP) in Bulletin of the Chemical Society of Japan
- Vol. 54 (7) , 1975-1977
- https://doi.org/10.1246/bcsj.54.1975
Abstract
Glass surfaces are bombarded by energetic neutral argon atoms or oxygen molecules, and the resulting sputtered ions are mass-analyzed. This technique has a higher depth resolution than conventional secondary-ion mass spectrometry. Quantitative depth-concentration profiles of sodium and potassium in the top layer of the surface (within several tens of nanometers of the surface) of Pyrex glass are obtained by the proposed technique.Keywords
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