The preparation of epitaxial InSb films by magnetron sputtering

• 1 August 1987
• journal article
• Published by Canadian Science Publishing in Canadian Journal of Physics
• Vol. 65  (8) , 872-877
• https://doi.org/10.1139/p87-135

Abstract

Keywords

• EPITAXIAL INSB FILMS
• FORMULA
• SPUTTERING
• TEXT
• SEE