Fabrication of an integrated microprobing head for fault analysis of mos integrated circuits
- 1 June 1988
- journal article
- Published by Elsevier in Sensors and Actuators
- Vol. 14 (2) , 125-132
- https://doi.org/10.1016/0250-6874(88)80059-3
Abstract
No abstract availableKeywords
This publication has 2 references indexed in Scilit:
- Electron-beam testing of VLSI circuitsIEEE Journal of Solid-State Circuits, 1979
- Optimization of the Hydrazine‐Water Solution for Anisotropic Etching of Silicon in Integrated Circuit TechnologyJournal of the Electrochemical Society, 1975