Cryogenic electron cyclotron resonance plasma etching

• 1 July 1992
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology A
• Vol. 10  (4) , 1307-1312
• https://doi.org/10.1116/1.578244

Abstract

Keywords

• ELECTRON CYCLOTRON RESONANCE
• PLASMA ETCHING