In situ plasma monitoring of pulsed laser deposition of diamond-like carbon films

• 1 December 1995
• journal article
• Published by Elsevier in Surface and Coatings Technology
• Vol. 76-77, 670-674
• https://doi.org/10.1016/02578-9729(68)00041-

Abstract

Keywords

• LASER ABLATION
• PROCESS CONTROL
• DIAMOND-LIKE CARBON
• THIN FILM