Electron beam induced voltage and injected charge modes of testing
- 1 January 1983
- Vol. 5 (2) , 53-70
- https://doi.org/10.1002/sca.4950050201
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Contactless electrical testing of large area specimens using electron beamsJournal of Vacuum Science and Technology, 1981
- Techniques for electron beam testing and restructuring integrated circuitsJournal of Vacuum Science and Technology, 1981
- Electron Beam Testing of Circuit Interconnections using Collector Stabilized Conductor ChargingJournal of Vacuum Science and Technology, 1973
- LIII. The Examination of p-n Junctions with the Scanning Electron Microscope†Journal of Electronics and Control, 1957