Absolute value measurements of thin film permeability.
- 1 January 1991
- journal article
- Published by The Magnetics Society of Japan in Journal of the Magnetics Society of Japan
- Vol. 15 (2) , 327-330
- https://doi.org/10.3379/jmsjmag.15.327
Abstract
A method of high precision measurement of the thin film permeability in the VHF frequency range has been developed. Permeability of film in a high magnetic field can be predicted with very high accuracy. This permeability is used as a standard of the measuring system. Multilayer films with various spacer thicknesses and a FeZrN microcrystalline film were measured. Results show that eddy current loss in the multilayer films cannot be suppressed even with spacers as thick as 2000Å and the microcrystalline film exhibits relatively high loss in the high frequency range.Keywords
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