Design and Fabrication of Highly Efficient Fan-Out Elements
- 1 July 1990
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 29 (7A) , L1307
- https://doi.org/10.1143/jjap.29.l1307
Abstract
This paper reports the calculation and fabrication of periodic phase structures for fan-out elements with a theoretical conversion efficiency close to 100% and perfect uniformity. We have measured an efficiency of 92% for a smooth kinoform structure fabricated in photoresist by laser beam writing lithography.Keywords
This publication has 1 reference indexed in Scilit:
- High-efficiency in-line multiple imaging by means of multiple phase hologramsOptics Communications, 1971