Some properties of TiO2-layers prepared by mid-frequency and dc reactive magnetron sputtering
- 1 September 1997
- journal article
- Published by Elsevier in Journal of Non-Crystalline Solids
- Vol. 218, 262-266
- https://doi.org/10.1016/s0022-3093(97)00239-1
Abstract
No abstract availableKeywords
This publication has 3 references indexed in Scilit:
- Large-scale antireflective coatings on glass produced by reactive magnetron sputteringSurface and Coatings Technology, 1993
- The microstructure of sputter‐deposited coatingsJournal of Vacuum Science & Technology A, 1986
- Ion-based methods for optical thin film depositionJournal of Materials Science, 1986