Summary Abstract: Effect of implantation on sputtered carbide films

• 1 April 1982
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science and Technology
• Vol. 20  (4) , 1406-1407
• https://doi.org/10.1116/1.571641

Abstract

Keywords

• EFFECT OF IMPLANTATION
• SUMMARY ABSTRACT
• IMPLANTATION ON SPUTTERED
• SPUTTERED CARBIDE FILMS