Abstract
The effects of the orientation of the LiNbO3 samples on the characteristics of planar waveguides fabricated by He+ implantation are presented. They show that the number of extraordinary modes is the same in Y‐ and Z‐cut samples whereas the Z‐cut samples support more ordinary modes than do Y‐cut samples. Also the attenuation of each mode is lower in Z‐cut material, showing that Z‐cut material is more suitable for the fabrication of low loss waveguides.

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