Ultrasonic Motors Using Piezoelectric Ceramic Multi-Mode Vibrators
- 1 January 1988
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 27 (S1)
- https://doi.org/10.7567/jjaps.27s1.192
Abstract
The purpose of this paper is to report development of an ultrasonic motor using piezoelectric ceramic multi-mode vibrators of circular or annular plates, in which degenerate horizontal vibration modes of the same or different form are used. Some constructions of the motor and its experimental characteristics are presented. The ultrasonic motor investigated herein shows special merit in its thin construction.Keywords
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