Phosphorus Diffusion in Silicon Free from the Surface Effect under Extrinie Conditions

• 1 November 1975
• journal article
• Published by IOP Publishing in Japanese Journal of Applied Physics
• Vol. 14  (11) , 1665-1672
• https://doi.org/10.1143/jjap.14.1665

Abstract

Keywords

• PHOSPHORUS DIFFUSION
• SILICON FREE
• EXTRINIE CONDITIONS
• DIFFUSION IN SILICON
• EFFECT UNDER EXTRINIE