Monitoring Of Optical Thin Films During Deposition
- 28 November 1983
- conference paper
- Published by SPIE-Intl Soc Optical Eng
- Vol. 401, 74-82
- https://doi.org/10.1117/12.935505
Abstract
By direct measurement of the evolution of the optical properties of a dielectric multilayer during its deposition we have access in real time to data on the thickness, the index and the structure of each individual layer. We describe such techniques which have been put into operation in Marseille to tackle the specific problem of monitoring the deposition of optical coatings on surfaces. We analyse the causes of the performance limitations of these monitoring methods.© (1983) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.Keywords
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