Measurement of N in nitrided oxides using spectroscopic immersion ellipsometry

• 1 May 1996
• journal article
• Published by American Vacuum Society in Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
• Vol. 14  (3) , 1697-1701
• https://doi.org/10.1116/1.589212

Abstract

Keywords

• MEASUREMENT
• SPECTROSCOPIC IMMERSION
• IMMERSION ELLIPSOMETRY
• USING SPECTROSCOPIC
• NITRIDED OXIDES
• OXIDES USING