A position recognition algorithm for semiconductor alignment based on structural pattern matching
- 1 January 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Acoustics, Speech, and Signal Processing
- Vol. 37 (12) , 2148-2157
- https://doi.org/10.1109/29.45557
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
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