Oxygen plasma effects on electrical properties of barium strontium titanate (BST) thin films

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1 February 1995

journal article
Published by Taylor & Francis in Integrated Ferroelectrics

Vol. 7 (1-4) , 207-214
https://doi.org/10.1080/10584589508220233

Abstract

No abstract available

Keywords

This publication has 1 reference indexed in Scilit:

SrTiO₃ and (Ba,Sr)TiO₃ Thin Films Preparation by Ion Beam Sputtering and Their Dielectric Properties
MRS Proceedings, 1991