Theoretical Analysis of Photoacoustic Displacement for Inhomogeneous Materials
- 1 October 1994
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 33 (10R)
- https://doi.org/10.1143/jjap.33.6032
Abstract
A method for theoretically analyzing photoacoustic displacement (PAD) induced by a pump beam in a three-dimensional model is presented. The analysis is based on rigorous methods in terms of temperature fields expanded by eigenmodes for an imaginary bounded system, and it is formulated in matrix form so that calculations for inhomogeneous materials can be performed systematically. It is shown that the theoretical calculations are in good agreement with the experimental results for aluminum thin films and ion-implanted silicon wafers, and that the theoretical model is experimentally verified. This method is useful for characterizing materials' properties, including structural analysis and subsurface defect detection of a sample.Keywords
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