Abstract
A three-dimensional array of microelectrodes for use in intraneural stimulation and recording is presented. The 128 electrodes are at the tips of silicon needles, which are electrically insulated from each other. The needles in the array have differing heights, resulting in a true three-dimensional electrode structure. The distance between the needles is 120 μm, while the heights are 600, 425 and 250 μm. An overview of the technology for the realization of the device is given, and the contacting of the array is discussed. The array is connected to a gate array (containing multiplexing electronics, current sources and buffer amplifiers) through controlled collapse chip connections Author(s) Frieswijk, T.A. Inst. for Biomed. Technol., Twente Univ., Enschede, Netherlands Rutten, W.L.C.

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