On the properties of TiN films prepared by vacuum arc deposition process.

• 1 January 1987
• journal article
• Published by The Vacuum Society of Japan in SHINKU
• Vol. 30  (10) , 786-792
• https://doi.org/10.3131/jvsj.30.786

Abstract

Keywords

• VACUUM ARC
• ARC DEPOSITION
• TIN FILMS
• DEPOSITION PROCESS
• FILMS PREPARED
• PROPERTIES