Spectroscopic ellipsometry with synchrotron radiation
- 1 July 1989
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 60 (7) , 2209-2212
- https://doi.org/10.1063/1.1140823
Abstract
The design, construction, and performance of an automatic photometric ellipsometer with rotating analyzer for the VUV region (5–30 eV) is described. The use of a synchrotron radiation source and triple-reflection polarizers makes this new spectral region accessible to spectroscopic ellipsometry. New dielectric function data are presented for InP(110), YBa2Cu3O7, and epitaxial CaF2/Si(111).Keywords
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