Magnetically focused line source electron gun
- 1 October 1982
- journal article
- Published by AIP Publishing in Review of Scientific Instruments
- Vol. 53 (10) , 1577-1580
- https://doi.org/10.1063/1.1136839
Abstract
A magnetically focused line source electron gun for selective heat treatment of surfaces is described. A model calculation consisting of an electric field computation routine and a trajectory tracing procedure was performed. An electron gun, corresponding to the model, was built and tested and its characteristics measured. The gun delivered 10 kw/cm2 on a strip of 80×2 mm, which could be scanned over a range of 100 mm in a direction perpendicular to the long dimension of the strip, so that an area of 80×100 mm could be heat treated in a short time of the order of milliseconds. The magnetic focusing provides for uniform electron energy and beam density throughout the scanned area.Keywords
This publication has 1 reference indexed in Scilit:
- Microsecond time-scale Si regrowth using a line-source electron beamApplied Physics Letters, 1981