Nanometer scale local epitaxy with silicon MBE

• 2 February 1993
• journal article
• Published by Elsevier in Journal of Crystal Growth
• Vol. 127  (1) , 447-450
• https://doi.org/10.1016/0022-0248(93)90658-j

Abstract

Keywords

• SHADOW
• EPITAXIAL
• SILICON
• CRYSTAL
• VACUUM
• DIODES
• NANOMETER
• MBE
• STRUCTURED
• ULTRA