MeV implantation for VLSI
- 1 May 1985
- journal article
- Published by Elsevier in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 10-11, 493-497
- https://doi.org/10.1016/0168-583x(85)90294-0
Abstract
No abstract availableKeywords
This publication has 4 references indexed in Scilit:
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- A Monte Carlo computer program for the transport of energetic ions in amorphous targetsNuclear Instruments and Methods, 1980
- Recoil contribution to ion-implantation energy-deposition distributionsJournal of Applied Physics, 1975
- Latch-Up in CMOS Integrated CircuitsIEEE Transactions on Nuclear Science, 1973