Pure Silica Zeolite Films as Low-k Dielectrics by Spin-On of Nanoparticle Suspensions

• 27 September 2001
• journal article
• research article
• Published by Wiley in Advanced Materials
• Vol. 13  (19) , 1463-1466
• https://doi.org/10.1002/1521-4095(200110)13:19<1463::aid-adma1463>3.0.co;2-h

Abstract

Keywords

• DIELECTRICS
• SILICA
• ZEOLITES