Travelling wave-driven microfabricated electrohydrodynamic pumps for liquids
- 1 December 1994
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 4 (4) , 217-226
- https://doi.org/10.1088/0960-1317/4/4/007
Abstract
The basic principles of high-frequency travelling wave-driven micropumps are explained. We describe the design and construction of closed pump systems which contain planar and three dimensional components fabricated by semiconductor technology. Theoretical and experimental results and further perspectives are discussed.Keywords
This publication has 13 references indexed in Scilit:
- Design of asynchronous dielectric micromotorsJournal of Electrostatics, 1994
- A traveling‐wave micropump for aqueous solutions: Comparison of 1 g and μg resultsElectrophoresis, 1993
- Microfabricated electrohydrodynamic (EHD) pumps for liquids of higher conductivityJournal of Microelectromechanical Systems, 1992
- Capillary electrophoresis and sample injection systems integrated on a planar glass chipAnalytical Chemistry, 1992
- Traveling‐wave dielectrophoresis of microparticlesElectrophoresis, 1992
- IC-processed electrostatic synchronous micromotorsSensors and Actuators, 1989
- Bipolar model for traveling-wave induced nonequilibrium double-layer streaming in insulating liquidsPhysics of Fluids, 1982
- The efficiency of electrohydrodynamic pumps in the attraction modeJournal of Electrostatics, 1980
- Traveling-Wave Bulk Electroconvection Induced across a Temperature GradientPhysics of Fluids, 1967
- Traveling-Wave Induced ElectroconvectionPhysics of Fluids, 1966