Design and Performance of a New Reactor for Vapor Phase Epitaxy of 3C, 6H, and 4H SiC
- 1 September 1996
- journal article
- Published by The Electrochemical Society in Journal of the Electrochemical Society
- Vol. 143 (9) , 2910-2919
- https://doi.org/10.1149/1.1837126
Abstract
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