Direct Fabrication of All-Inorganic Logic Elements and Microelectromechanical Systems from Nanoparticle Precursors
- 1 January 2000
- journal article
- Published by Springer Nature in MRS Proceedings
Abstract
Here we describe the fabrication of electrostatic motors by liquid embossing, a contact stamp-based method of patterning liquids with sub-micron resolution. We also demonstrate AFM nano-assembly which can produce sub-40 nm dots and lines by transferring either liquid or solid material from a reservoir to a deposition area. Both of these non-lithographic patterning techniques are applicable to nanocrystal, organic, and polymeric solutions and liquids.Keywords
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