On the rapid heat lamp annealing of tantalum silicide/silicon films
- 31 May 1985
- journal article
- Published by Elsevier in Materials Letters
- Vol. 3 (7-8) , 314-318
- https://doi.org/10.1016/0167-577x(85)90030-8
Abstract
No abstract availableKeywords
This publication has 6 references indexed in Scilit:
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- Graphite strip rapid isothermal annealing of tantalum silicideJournal of Applied Physics, 1984
- Short Time AnnealingJournal of the Electrochemical Society, 1983
- Phosphorus out diffusion from double-layered tantalum silicide/polycrystalline silicon structureJournal of Vacuum Science & Technology B, 1983
- MoSi2formation by rapid isothermal annealingIEEE Electron Device Letters, 1982
- Light-flash induced metallic silicides from titanium films on siliconApplied Physics Letters, 1981