Diffusion-Induced Stress and Lattice Disorders in Silicon

• 1 January 1966
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 113  (8) , 819
• https://doi.org/10.1149/1.2424127

Abstract

Keywords

• SILICON
• LATTICE DISORDERS
• DIFFUSION INDUCED STRESS