Auger and x-ray electron spectroscopy studies of hBN, cBN, and N+2 ion irradiation of boron and boron nitride
- 1 November 1990
- journal article
- Published by American Vacuum Society in Journal of Vacuum Science & Technology A
- Vol. 8 (6) , 4026-4032
- https://doi.org/10.1116/1.576471
Abstract
Boron and nitrogen KVV Auger electron spectroscopy (AES) and core level x-ray photoelectron spectroscopy (XPS) features are shown to be conspicuously different for the cubic and hexagonal phases of boron nitride, i.e., cBN and hBN, respectively. The origin and assignments of these features are discussed in terms of the valence band density of states and plasmon losses. Application of these results to the identification of the boron nitride phase formed by N+2 irradiation of boron and N+2 or Ar+ irradiation of cubic boron nitride are presented.Keywords
This publication has 0 references indexed in Scilit: