X-ray observation of compositional modulation caused by phase decomposition in GaInP ternary alloys

Publisher Website
Google Scholar
Abstract
The phase decomposition of GaInP ternary alloys grown by low-pressure metalorganic vapor phase epitaxy has been investigated using x-ray diffraction. Diffuse scattering around the Bragg peaks due to compositional modulation was observed clearly for the first time, for samples containing high dislocation densities. Thermodynamically, the present growth temperature lies between the chemical and coherent spinodal lines. It is suggested that phase decomposition of the alloys occurs clearly only when the strain relaxation during crystal growth is possible under the present growth conditions.