Gas-Phase Etching of Silicon With Chlorine

• 1 January 1971
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 118  (4) , 634
• https://doi.org/10.1149/1.2408126

Abstract

Keywords

• GAS PHASE ETCHING
• SILICON WITH CHLORINE
• ETCHING OF SILICON