Control of the Deposition of Silicon Nitride Layers by 2537Å Radiation

• 1 January 1972
• journal article
• Published by The Electrochemical Society in Journal of the Electrochemical Society
• Vol. 119  (3) , 372
• https://doi.org/10.1149/1.2404205

Abstract

Keywords

• RADIATION
• SILICON NITRIDE LAYERS
• DEPOSITION OF SILICON
• LAYERS BY 2537A