Surface micromachined interferometer-based optical reading technique

• 25 November 1996
• journal article
• Published by AIP Publishing in Applied Physics Letters
• Vol. 69  (22) , 3324-3326
• https://doi.org/10.1063/1.117294

Abstract

Keywords

• SURFACE MICROMACHINING
• ATOMIC FORCE MICROSCOPY
• OPTICAL STORAGE
• ATOMIC FORCE MICROSCOPE